Secondary ion mass spectrometry applications for depth profiling and surface characterization by fred stevie 2015 09 15 stevie fred books amazonca. Secondary ion mass spectrometry sims is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm when those capabilities are combined with the ability to provide that analysis as a function of depth sims has proved to be a valued technique for a wide range of applications. Secondary ion mass spectrometry applications for depth profiling and surface characterization fred stevie this book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data obtained. Secondary ion mass spectrometry sims is a surface technique with high surface sensitivity high spatial resolution chemical imaging and unique depth profiling capabilities recent research shows that sims has great potential in analyzing both surface and bulk chemical information of pm. Stanford libraries official online search tool for books media journals databases government documents and more